Photoinduced paramagnetic centers in amorphous silicon oxynitride

Room-temperature metastable paramagnetic point defects are created in plasma-enhanced chemical vapor deposited silicon oxynitride films by exposing the films to ultraviolet and vacuum ultraviolet illumination. We compare the response of films with low, intermediate, and high oxygen content. The defe...

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Veröffentlicht in:	Journal of applied physics 1991-11, Vol.70 (9), p.4969-4972
Hauptverfasser:	YOUNT, J. T, KRAUS, G. T, LENAHAN, P. M, KRICK, D. T
Format:	Artikel
Sprache:	eng
Schlagworte:	Color centers and other defects Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron paramagnetic resonance and relaxation Exact sciences and technology Magnetic resonances and relaxations in condensed matter, mössbauer effect Physics
Online-Zugang:	Volltext
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