Photoinduced paramagnetic centers in amorphous silicon oxynitride
Room-temperature metastable paramagnetic point defects are created in plasma-enhanced chemical vapor deposited silicon oxynitride films by exposing the films to ultraviolet and vacuum ultraviolet illumination. We compare the response of films with low, intermediate, and high oxygen content. The defe...
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| Veröffentlicht in: | Journal of applied physics 1991-11, Vol.70 (9), p.4969-4972 |
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| container_end_page | 4972 |
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| container_issue | 9 |
| container_start_page | 4969 |
| container_title | Journal of applied physics |
| container_volume | 70 |
| creator | YOUNT, J. T KRAUS, G. T LENAHAN, P. M KRICK, D. T |
| description | Room-temperature metastable paramagnetic point defects are created in plasma-enhanced chemical vapor deposited silicon oxynitride films by exposing the films to ultraviolet and vacuum ultraviolet illumination. We compare the response of films with low, intermediate, and high oxygen content. The defects include unpaired electrons on silicons bonded to nitrogen atoms (K centers), unpaired electrons on bridging nitrogens, and what appear to be overcoordinated nitrogen centers. |
| doi_str_mv | 10.1063/1.349024 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0021-8979 |
| ispartof | Journal of applied physics, 1991-11, Vol.70 (9), p.4969-4972 |
| issn | 0021-8979 1089-7550 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_25359519 |
| source | AIP Digital Archive |
| subjects | Color centers and other defects Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron paramagnetic resonance and relaxation Exact sciences and technology Magnetic resonances and relaxations in condensed matter, mössbauer effect Physics |
| title | Photoinduced paramagnetic centers in amorphous silicon oxynitride |
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