Engineering Wafer-Scale Epitaxial Two-Dimensional Materials through Sapphire Template Screening for Advanced High-Performance Nanoelectronics

In view of its epitaxial seeding capability, c-plane single crystalline sapphire represents one of the most enticing, industry-compatible templates to realize manufacturable deposition of single crystalline two-dimensional transition metal dichalcogenides (MX2) for functional, ultrascaled, nanoelect...

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Veröffentlicht in:	ACS nano 2021-06, Vol.15 (6), p.9482-9494
Hauptverfasser:	Shi, Yuanyuan, Groven, Benjamin, Serron, Jill, Wu, Xiangyu, Nalin Mehta, Ankit, Minj, Albert, Sergeant, Stefanie, Han, Han, Asselberghs, Inge, Lin, Dennis, Brems, Steven, Huyghebaert, Cedric, Morin, Pierre, Radu, Iuliana, Caymax, Matty
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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