An ellipsometric study of the effects of thickness and substrate on CoCr films

The effects of thickness and substrate of d.c. magnetron sputtered CoCr films are investigated by spectroellipsometry. The ellipsometric data indicate that the morphology of CoCr films varies as a function of the film thickness and proper choice of substrate can reduce the thickness dependence. It i...

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Veröffentlicht in:	Thin solid films 1989-03, Vol.170 (2), p.273-284
Hauptverfasser:	Li, Z.-M., Parsons, R.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysing. Testing. Standards Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Measurement of properties and materials state Metals, semimetals and alloys Metals. Metallurgy Nondestructive testing Physics Specific materials Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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Beschreibung
Zusammenfassung:	The effects of thickness and substrate of d.c. magnetron sputtered CoCr films are investigated by spectroellipsometry. The ellipsometric data indicate that the morphology of CoCr films varies as a function of the film thickness and proper choice of substrate can reduce the thickness dependence. It is shown that an NiCr underlayer is capable of reducing the thickness dependence because of its similarity in microstructure to CoCr.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/0040-6090(89)90733-5