InGaAs-GaAs quantum well vertical-cavity surface-emitting laser using molecular beam epitaxial regrowth

Data are presented demonstrating a design and fabrication process for the realization of high-efficiency, low-threshold vertical-cavity InGaAs-GaAs quantum well lasers with light emission through the top (epitaxial) surface. Crystal growth is performed using a two-step molecular beam epitaxial growt...

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Veröffentlicht in:Applied physics letters 1991-03, Vol.58 (11), p.1122-1124
Hauptverfasser: LEI, C, ROGERS, T. J, DEPPE, D. G, STREETMAN, B. G
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container_end_page 1124
container_issue 11
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container_title Applied physics letters
container_volume 58
creator LEI, C
ROGERS, T. J
DEPPE, D. G
STREETMAN, B. G
description Data are presented demonstrating a design and fabrication process for the realization of high-efficiency, low-threshold vertical-cavity InGaAs-GaAs quantum well lasers with light emission through the top (epitaxial) surface. Crystal growth is performed using a two-step molecular beam epitaxial growth process to utilize lateral current injection into the device active region. The device structure allows the top surface (emission side) reflector to be optimized (for either high efficiency or low threshold) after crystal growth through the deposition of electron beam evaporated dielectric layers. Maximum continuous-wave output power in excess of 1.2 mW at 300 K, and differential quantum efficiency greater than 25% (3.9 mA threshold) are demonstrated. Low-threshold values of 2.3 mA are measured on devices with increased mirror reflectivity (through the addition of dielectric layers).
doi_str_mv 10.1063/1.104390
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subjects Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Holography
Optics
Physics
title InGaAs-GaAs quantum well vertical-cavity surface-emitting laser using molecular beam epitaxial regrowth
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