Ultramicrohardness of aluminum and aluminum alloy thin films

The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure rela...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Thin solid films 1989-05, Vol.172 (1), p.51-60
Hauptverfasser: Dirks, A.G., Wierenga, P.E., van den Broek, J.J.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 60
container_issue 1
container_start_page 51
container_title Thin solid films
container_volume 172
creator Dirks, A.G.
Wierenga, P.E.
van den Broek, J.J.
description The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium. The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.
doi_str_mv 10.1016/0040-6090(89)90117-X
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_25279211</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>004060908990117X</els_id><sourcerecordid>25279211</sourcerecordid><originalsourceid>FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</originalsourceid><addsrcrecordid>eNp9kE1LAzEQhoMoWKv_wMMeRPSwmq_uJiCCFL-g4MVCb2GandBIdrcmu0L_vVtbxJOnYeB532EeQs4ZvWGUFbeUSpoXVNMrpa81ZazMFwdkxFSpc14KdkhGv8gxOUnpg1LKOBcjcjcPXYTa29iuIFYNppS1LoPQ177p6wya6s8SQrvJupVvMudDnU7JkYOQ8Gw_x2T-9Pg-fclnb8-v04dZbkUhu5wjgtSosaBqIikXHAom0AJCJShq5aylzi51YUulXKVKOdEMnGSVYrAsxZhc7nrXsf3sMXWm9sliCNBg2yfDJ7zUnLEBlDtweCeliM6so68hbgyjZqvKbD2YrQejtPlRZRZD7GLfD8lCcBEa69NvtuRCMikG7H6H4fDrl8dokvXYWKx8RNuZqvX_3_kGvz19Yg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>25279211</pqid></control><display><type>article</type><title>Ultramicrohardness of aluminum and aluminum alloy thin films</title><source>Elsevier ScienceDirect Journals Complete</source><creator>Dirks, A.G. ; Wierenga, P.E. ; van den Broek, J.J.</creator><creatorcontrib>Dirks, A.G. ; Wierenga, P.E. ; van den Broek, J.J.</creatorcontrib><description>The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium. The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/0040-6090(89)90117-X</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Applied sciences ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Hardness ; Materials science ; Mechanical and acoustical properties of condensed matter ; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology ; Mechanical properties of solids ; Metals, semimetals and alloys ; Metals. Metallurgy ; Physics ; Specific materials ; Tribology and hardness</subject><ispartof>Thin solid films, 1989-05, Vol.172 (1), p.51-60</ispartof><rights>1989</rights><rights>1989 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</citedby><cites>FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/0040-6090(89)90117-X$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,777,781,3537,27905,27906,45976</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=7234143$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Dirks, A.G.</creatorcontrib><creatorcontrib>Wierenga, P.E.</creatorcontrib><creatorcontrib>van den Broek, J.J.</creatorcontrib><title>Ultramicrohardness of aluminum and aluminum alloy thin films</title><title>Thin solid films</title><description>The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium. The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</description><subject>Applied sciences</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Hardness</subject><subject>Materials science</subject><subject>Mechanical and acoustical properties of condensed matter</subject><subject>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</subject><subject>Mechanical properties of solids</subject><subject>Metals, semimetals and alloys</subject><subject>Metals. Metallurgy</subject><subject>Physics</subject><subject>Specific materials</subject><subject>Tribology and hardness</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1989</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LAzEQhoMoWKv_wMMeRPSwmq_uJiCCFL-g4MVCb2GandBIdrcmu0L_vVtbxJOnYeB532EeQs4ZvWGUFbeUSpoXVNMrpa81ZazMFwdkxFSpc14KdkhGv8gxOUnpg1LKOBcjcjcPXYTa29iuIFYNppS1LoPQ177p6wya6s8SQrvJupVvMudDnU7JkYOQ8Gw_x2T-9Pg-fclnb8-v04dZbkUhu5wjgtSosaBqIikXHAom0AJCJShq5aylzi51YUulXKVKOdEMnGSVYrAsxZhc7nrXsf3sMXWm9sliCNBg2yfDJ7zUnLEBlDtweCeliM6so68hbgyjZqvKbD2YrQejtPlRZRZD7GLfD8lCcBEa69NvtuRCMikG7H6H4fDrl8dokvXYWKx8RNuZqvX_3_kGvz19Yg</recordid><startdate>19890501</startdate><enddate>19890501</enddate><creator>Dirks, A.G.</creator><creator>Wierenga, P.E.</creator><creator>van den Broek, J.J.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>19890501</creationdate><title>Ultramicrohardness of aluminum and aluminum alloy thin films</title><author>Dirks, A.G. ; Wierenga, P.E. ; van den Broek, J.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1989</creationdate><topic>Applied sciences</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Hardness</topic><topic>Materials science</topic><topic>Mechanical and acoustical properties of condensed matter</topic><topic>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</topic><topic>Mechanical properties of solids</topic><topic>Metals, semimetals and alloys</topic><topic>Metals. Metallurgy</topic><topic>Physics</topic><topic>Specific materials</topic><topic>Tribology and hardness</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dirks, A.G.</creatorcontrib><creatorcontrib>Wierenga, P.E.</creatorcontrib><creatorcontrib>van den Broek, J.J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dirks, A.G.</au><au>Wierenga, P.E.</au><au>van den Broek, J.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Ultramicrohardness of aluminum and aluminum alloy thin films</atitle><jtitle>Thin solid films</jtitle><date>1989-05-01</date><risdate>1989</risdate><volume>172</volume><issue>1</issue><spage>51</spage><epage>60</epage><pages>51-60</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium. The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/0040-6090(89)90117-X</doi><tpages>10</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0040-6090
ispartof Thin solid films, 1989-05, Vol.172 (1), p.51-60
issn 0040-6090
1879-2731
language eng
recordid cdi_proquest_miscellaneous_25279211
source Elsevier ScienceDirect Journals Complete
subjects Applied sciences
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Hardness
Materials science
Mechanical and acoustical properties of condensed matter
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Mechanical properties of solids
Metals, semimetals and alloys
Metals. Metallurgy
Physics
Specific materials
Tribology and hardness
title Ultramicrohardness of aluminum and aluminum alloy thin films
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-17T14%3A58%3A43IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Ultramicrohardness%20of%20aluminum%20and%20aluminum%20alloy%20thin%20films&rft.jtitle=Thin%20solid%20films&rft.au=Dirks,%20A.G.&rft.date=1989-05-01&rft.volume=172&rft.issue=1&rft.spage=51&rft.epage=60&rft.pages=51-60&rft.issn=0040-6090&rft.eissn=1879-2731&rft.coden=THSFAP&rft_id=info:doi/10.1016/0040-6090(89)90117-X&rft_dat=%3Cproquest_cross%3E25279211%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=25279211&rft_id=info:pmid/&rft_els_id=004060908990117X&rfr_iscdi=true