Ultramicrohardness of aluminum and aluminum alloy thin films
The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure rela...
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Veröffentlicht in: | Thin solid films 1989-05, Vol.172 (1), p.51-60 |
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creator | Dirks, A.G. Wierenga, P.E. van den Broek, J.J. |
description | The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium.
The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed. |
doi_str_mv | 10.1016/0040-6090(89)90117-X |
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The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/0040-6090(89)90117-X</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Applied sciences ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Hardness ; Materials science ; Mechanical and acoustical properties of condensed matter ; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology ; Mechanical properties of solids ; Metals, semimetals and alloys ; Metals. Metallurgy ; Physics ; Specific materials ; Tribology and hardness</subject><ispartof>Thin solid films, 1989-05, Vol.172 (1), p.51-60</ispartof><rights>1989</rights><rights>1989 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</citedby><cites>FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/0040-6090(89)90117-X$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,777,781,3537,27905,27906,45976</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=7234143$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Dirks, A.G.</creatorcontrib><creatorcontrib>Wierenga, P.E.</creatorcontrib><creatorcontrib>van den Broek, J.J.</creatorcontrib><title>Ultramicrohardness of aluminum and aluminum alloy thin films</title><title>Thin solid films</title><description>The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium.
The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</description><subject>Applied sciences</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Hardness</subject><subject>Materials science</subject><subject>Mechanical and acoustical properties of condensed matter</subject><subject>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</subject><subject>Mechanical properties of solids</subject><subject>Metals, semimetals and alloys</subject><subject>Metals. Metallurgy</subject><subject>Physics</subject><subject>Specific materials</subject><subject>Tribology and hardness</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1989</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LAzEQhoMoWKv_wMMeRPSwmq_uJiCCFL-g4MVCb2GandBIdrcmu0L_vVtbxJOnYeB532EeQs4ZvWGUFbeUSpoXVNMrpa81ZazMFwdkxFSpc14KdkhGv8gxOUnpg1LKOBcjcjcPXYTa29iuIFYNppS1LoPQ177p6wya6s8SQrvJupVvMudDnU7JkYOQ8Gw_x2T-9Pg-fclnb8-v04dZbkUhu5wjgtSosaBqIikXHAom0AJCJShq5aylzi51YUulXKVKOdEMnGSVYrAsxZhc7nrXsf3sMXWm9sliCNBg2yfDJ7zUnLEBlDtweCeliM6so68hbgyjZqvKbD2YrQejtPlRZRZD7GLfD8lCcBEa69NvtuRCMikG7H6H4fDrl8dokvXYWKx8RNuZqvX_3_kGvz19Yg</recordid><startdate>19890501</startdate><enddate>19890501</enddate><creator>Dirks, A.G.</creator><creator>Wierenga, P.E.</creator><creator>van den Broek, J.J.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>19890501</creationdate><title>Ultramicrohardness of aluminum and aluminum alloy thin films</title><author>Dirks, A.G. ; Wierenga, P.E. ; van den Broek, J.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c364t-2eea49e9e608540232a613ecaead30e98fcc0fcb96c788fd874591af41d81ab73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1989</creationdate><topic>Applied sciences</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Hardness</topic><topic>Materials science</topic><topic>Mechanical and acoustical properties of condensed matter</topic><topic>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</topic><topic>Mechanical properties of solids</topic><topic>Metals, semimetals and alloys</topic><topic>Metals. Metallurgy</topic><topic>Physics</topic><topic>Specific materials</topic><topic>Tribology and hardness</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dirks, A.G.</creatorcontrib><creatorcontrib>Wierenga, P.E.</creatorcontrib><creatorcontrib>van den Broek, J.J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dirks, A.G.</au><au>Wierenga, P.E.</au><au>van den Broek, J.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Ultramicrohardness of aluminum and aluminum alloy thin films</atitle><jtitle>Thin solid films</jtitle><date>1989-05-01</date><risdate>1989</risdate><volume>172</volume><issue>1</issue><spage>51</spage><epage>60</epage><pages>51-60</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>The ultramicrohardness (UMH) of vapor-deposited aluminum and aluminum alloy thin films was determined at room temperature by indentation experiments at small indenter forces. For pure aluminum films both the dependence of the measured hardness upon film thickness and the hardness-microstructure relationship are described. The increase in UMH of aluminum by alloying was studied for alloy films prepared by simultaneous vapor deposition of aluminum with the metals silver, copper, titanium or vanadium.
The hardness of the pure aluminum films hardly changes upon annealing. The as-deposited aluminum alloy films are single-phase alloys, which are highly supersaturated. Consequently, their hardness values are rather high. Alloy softening was observed after an anneal treatment at relatively high temperature. The importance of the various hardening mechanisms will be discussed.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/0040-6090(89)90117-X</doi><tpages>10</tpages></addata></record> |
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subjects | Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Hardness Materials science Mechanical and acoustical properties of condensed matter Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Mechanical properties of solids Metals, semimetals and alloys Metals. Metallurgy Physics Specific materials Tribology and hardness |
title | Ultramicrohardness of aluminum and aluminum alloy thin films |
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