Mechanical properties of diamondlike carbon films

Diamondlike carbon (DLC) films have been deposited onto room-temperature silicon substrates, which are placed on a cathode, in a dc plasma of methane (CH4) and hydrogen (H2) gas mixture. Ultramicroindentation hardness and Young’s modulus for the films were measured. The mechanical properties of DLC...

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Veröffentlicht in:	Journal of applied physics 1989-03, Vol.65 (5), p.1918-1922
Hauptverfasser:	HOSHINO, S, FUJII, K, SHOHATA, N, YAMAGUCHI, H, TSUKAMOTO, Y, YANAGISAWA, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physical properties of thin films, nonelectronic Physics Solid surfaces and solid-solid interfaces Surface energy thermodynamic properties Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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