Electrode phenomena during anodic bonding of silicon to sodium borosilicate glass

Ohmic drop in the glass establishes the high interfacial fields that assist bonding. The process is modeled and discussed in detail. 31 refs.

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Electrochemical Society 1991-10, Vol.138 (10), p.3089-3094
1. Verfasser:	ALBAUGH, K. B
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Electrochemistry Exact sciences and technology General and physical chemistry Miscellaneous Study of interfaces
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Ohmic drop in the glass establishes the high interfacial fields that assist bonding. The process is modeled and discussed in detail. 31 refs.
ISSN:	0013-4651 1945-7111
DOI:	10.1149/1.2085374