Alkaline ion sensitivity of insulator-silicon structures with glass membranes prepared by the sol-gel technique

The advantages of using sol-gel glass sensing layers for insulator-silicon structures include good adhesion on Si and Si-related insulators, easy and reproducible deposition, and the possibility of patterning the films by photolithography. Electrolyte-glass membrane-insulator-semiconductor (EMIS) an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of materials science letters 1991-01, Vol.10 (19), p.1129-1131
Hauptverfasser:	BAGNOLI, P. E, GUGLIELMI, M, COLOMBO, P
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Colloidal state and disperse state Exact sciences and technology General and physical chemistry Membranes
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!