A critical review on challenges and trend of ultrapure water production process

The recent and vigorous developments in semiconductor technology strictly request better quality and large quantity of ultrapure water (UPW) for their production. It is crucial to secure a large amount of raw water for the future development of UPW production. Using reclaimed water as alternative ra...

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Veröffentlicht in:	The Science of the total environment 2021-09, Vol.785, p.147254-147254, Article 147254
Hauptverfasser:	Zhang, Xinbo, Yang, Yuanying, Ngo, Huu Hao, Guo, Wenshan, Wen, Haitao, Wang, Xiao, Zhang, Jianqing, Long, Tianwei
Format:	Artikel
Sprache:	eng
Schlagworte:	Advanced oxidation Organic Ultrapure water Urea
Online-Zugang:	Volltext
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