Characterization of surface layers produced by ion implantation of nitrogen in bulk aluminium

Surface layers of overall extent less than 400 nm have been generated by ion implantation of nitrogen as N + or N + 2 at energies of 50 and 100 keV into high-purity aluminum sheet at ambient temperature. These layers have been characterized by Auger electron spectroscopy with concurrent ion etching,...

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Veröffentlicht in:	Thin solid films 1989-01, Vol.168 (2), p.263-280
Hauptverfasser:	McCune, R.C., Donlon, W.T., Plummer, H.K., Toth, L., Kunz, F.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Metals, semimetals and alloys Metals. Metallurgy Physics Solid surfaces and solid-solid interfaces Specific materials Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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