Theoretical considerations relating to the characteristic curves of the silver chalcogenide glass inorganic photoresists

We present a calculation of the characteristic curves of the silver/chalcogenide glass inorganic photoresists which is based on a theory of photoinduced diffusion of silver into the chalcogenide glasses. The silver concentration profiles in the glasses are calculated for the cases of semi-infinite as well as finite slabs. We also consider the effect on the silver concentration profiles of the intrinsic absorption of photons, which results when illumination by photons whose energies are above the band-gap energies of the glass is employed. It is found that very high values of the contrast parameter are attainable for prolonged development.