Thermodynamic Analysis of Chemical Vapor Deposition of BN + AIN Composite Coatings

Thermodynamic calculations were performed using a modified solgasmix‐pv computer program in order to study the feasibility of codepositing boron nitride (BN) plus aluminum nitride (AIN) by chemical vapor deposition. Reactants considered were AICl3, BCl3 or B2H6, NH3, and H2. Deposition diagrams were...

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Veröffentlicht in:	Journal of the American Ceramic Society 1990-06, Vol.73 (6), p.1510-1518
Hauptverfasser:	Twait, D. J., Lackey, W. J., Smith, Arlynn W., Lee, Woo Y., Hanigofsky, John A.
Format:	Artikel
Sprache:	eng
Schlagworte:	aluminum nitride Applied sciences boron nitride Building materials. Ceramics. Glasses Ceramic industries Chemical industry and chemicals coatings deposition Exact sciences and technology Miscellaneous Technical ceramics thermodynamics
Online-Zugang:	Volltext
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