Structure study on Bi-Sr-Ca-Cu-O thin films prepared by low temperature process

Thin films of the Bi--Sr--Ca--Cu--O system were prepared at substrate temperatures between 550-600 deg C. The film deposited at 570 deg C showed X-ray diffraction pattern of Bi sub 2 Sr sub 2 Ca sub 2 Cu sub 3 O sub y phase and had a zero resistance temperature T sub c at 23K. After annealing at 570 deg C under oxygen pressure of 1 atm, the zero resistance temperature T sub c increased to 45K, but under the pressure of 0.1 atm, the crystal structure was changed and nonconducting Ca--Cu--O phase appeared. 6 ref.--AA