Phase Identification and Ordered Vacancy Imaging in Epitaxial Metallic Ta2N Thin Films

Epitaxial transition metal nitrides (TMNs) are an emerging class of crystalline thin film metals that can be heteroepitaxially integrated with common group III-nitride semiconductors such as GaN and AlN. Within a binary family of TMN compounds (i.e., Ta x N y ), several phases typically exist, many...

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Veröffentlicht in:	ACS applied materials & interfaces 2021-03, Vol.13 (10), p.12575-12580
Hauptverfasser:	Lang, Andrew C, Katzer, D. Scott, Nepal, Neeraj, Meyer, David J, Stroud, Rhonda M
Format:	Artikel
Sprache:	eng
Schlagworte:	Surfaces, Interfaces, and Applications
Online-Zugang:	Volltext
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