$Crystallographic Orientation Analysis of Nanocrystalline Tungsten Thin Film Using TEM Precession Electron Diffraction and SEM Transmission Kikuchi Diffraction$

Crystallographic Orientation Analysis of Nanocrystalline Tungsten Thin Film Using TEM Precession Electron Diffraction and SEM Transmission Kikuchi Diffraction

Two advanced, automated crystal orientation mapping techniques suited for nanocrystalline materials—precession electron diffraction (PED) in transmission electron microscopy (TEM) and on-axis transmission Kikuchi diffraction (TKD) in scanning electron microscopy (SEM)—are evaluated by comparing the...

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Veröffentlicht in:	Microscopy and microanalysis 2021-04, Vol.27 (2), p.237-249
Hauptverfasser:	Jeong, Jiwon, Jang, Woo-Sung, Kim, Kwang Hun, Kostka, Aleksander, Gu, Gilho, Kim, Young-Min, Oh, Sang Ho
Format:	Artikel
Sprache:	eng
Schlagworte:	Angular resolution Crystal structure Crystallography Electron diffraction Grain boundaries Grain orientation Grain size Ion beams Mapping Materials Science Applications Misalignment Nanocrystals Precession Scanning electron microscopy Sensors Statistical analysis Thin films Tin Transmission electron microscopy Tungsten
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