Detection of sputtered neutral atoms by nonresonant multiphoton ionization

A nonresonant multiphoton ionization method was applied for the detection of sputtered neutrals using a time-of-flight mass spectrometer. The preliminary results for Cu, Ni and Cu-Ni alloy samples are reported from the viewpoint of a semiquantitative surface analysis. Photoions from pure elements we...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1988-04, Vol.27 (4), p.L502-L505
Hauptverfasser:	SHIMIZU, H, HASHIZUME, H, ICHIMURA, S, KOKUBUN, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Materials science Metals, semimetals and alloys Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other electron-impact emission phenomena Other interactions of matter with particles and radiation Physics Specific materials
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