Structure and adhesion of vapour deposits, partially ionized vapour deposits, cluster deposits and partially ionized cluster deposits

Magnesium and CdS films deposited in a high vacuum from neutral and partially ionized beams of atoms (molecules) and multiatomic particles (clusters) using vapour deposition (VD), partially ionized vapour deposition (PIVD), cluster deposition (CD) and partially ionized cluster deposition (PICD) tech...

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Veröffentlicht in:	Thin solid films 1985-09, Vol.131 (3), p.289-295
Hauptverfasser:	Tochitsky, E.I., Gritskevich, R.N., Obukhov, V.E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Metals, semimetals and alloys Physics Specific materials Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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