Experimental investigations and analysis for high-quality Nb /Al-AlO(x)/Nb Josephson junctions

The junction characteristics of Nb/Al-AlO(x)/Nb are examined. The self-aligned contact (SAC) process for fabricating the Nb /Al-AlO(x)/Nb junctions is described. The effects of the deposition conditions, Al layer thickness, aging, and annealing on the junction characteristics are studied. The oxidat...

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Veröffentlicht in:	Journal of applied physics 1987-05, Vol.61, p.4835-4849
Hauptverfasser:	MOROHASHI, S H I N' I C H I, HASUO, SHINYA
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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