Ultra-dry air plasma treatment for enhancing the dielectric properties of Al2O3-GPTMS-PMMA hybrid dielectric gate layers in a-IGZO TFT applications

We assessed the effects of ultra dry-air plasma surface treatments on the properties of Al2O3-GPTMS-PMMA hybrid dielectric layers for applications to high-performance amorphous Indium Gallium Zinc Oxide (a-IGZO) thin film transistors (TFTs). The hybrid layers were deposited by an easy dip coating so...

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Veröffentlicht in:	Nanotechnology 2021-03, Vol.32 (13), p.135203-135203
Hauptverfasser:	Meza-Arroyo, J, Syamala Rao, M G, Chandra Sekhar Reddy, K, Sánchez-Martinez, A, Rodríguez-López, O, Quevedo-López, M, Ramírez-Bon, R
Format:	Artikel
Sprache:	eng
Schlagworte:	a-IGZO TFTs hybrid dielectric low-temperature ultra-dry air plasma treatment
Online-Zugang:	Volltext
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