Enhancing the dynamic range of deformable mirrors with compression bias

We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design princi...

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Veröffentlicht in:Optics express 2020-12, Vol.28 (26), p.38480-38490
Hauptverfasser: Cao, Huy Tuong, Ng, Sebastian W S, Noh, Minkyun, Brooks, Aidan, Matichard, Fabrice, Veitch, Peter J
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container_end_page 38490
container_issue 26
container_start_page 38480
container_title Optics express
container_volume 28
creator Cao, Huy Tuong
Ng, Sebastian W S
Noh, Minkyun
Brooks, Aidan
Matichard, Fabrice
Veitch, Peter J
description We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.
doi_str_mv 10.1364/OE.408921
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title Enhancing the dynamic range of deformable mirrors with compression bias
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