Depth structure analysis by surface scanning in near-field microscopes
High-resolution imaging of the surfaces of samples can be performed using near-field optical microscopes by scanning a small light spot; however, structures located deep beneath cannot be observed because the light spot spreads in three directions. In this study, we propose an observation technique...
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| Veröffentlicht in: | Optics letters 2020-11, Vol.45 (22), p.6302-6305 |
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| container_title | Optics letters |
| container_volume | 45 |
| creator | Sao, Mayu Takeda, Satoru Inami, Wataru Kawata, Yoshimasa |
| description | High-resolution imaging of the surfaces of samples can be performed
using near-field optical microscopes by scanning a small light spot;
however, structures located deep beneath cannot be observed because
the light spot spreads in three directions. In this study, we propose
an observation technique for near-field optical microscopes that can
obtain depth information within the resolution of the diffraction
limit of light by analyzing interference patterns formed with
divergent incident light and scattered light from a sample. We analyze
depth structures by evaluating correlation coefficients between
observed interference patterns and calculated reference patterns. Our
technique can observe both high-resolution surface images and the
diffraction-limited three-dimensional structure by scanning a
near-field light source on a single plane. |
| doi_str_mv | 10.1364/OL.402490 |
| format | Article |
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using near-field optical microscopes by scanning a small light spot;
however, structures located deep beneath cannot be observed because
the light spot spreads in three directions. In this study, we propose
an observation technique for near-field optical microscopes that can
obtain depth information within the resolution of the diffraction
limit of light by analyzing interference patterns formed with
divergent incident light and scattered light from a sample. We analyze
depth structures by evaluating correlation coefficients between
observed interference patterns and calculated reference patterns. Our
technique can observe both high-resolution surface images and the
diffraction-limited three-dimensional structure by scanning a
near-field light source on a single plane.</description><identifier>ISSN: 0146-9592</identifier><identifier>EISSN: 1539-4794</identifier><identifier>DOI: 10.1364/OL.402490</identifier><language>eng</language><publisher>Washington: Optical Society of America</publisher><subject>Correlation analysis ; Correlation coefficients ; Diffraction patterns ; High resolution ; Image resolution ; Incident light ; Interference ; Light ; Light diffraction ; Light sources ; Light spots ; Microscopes ; Near field optical microscopes ; Optical microscopes ; Structural analysis</subject><ispartof>Optics letters, 2020-11, Vol.45 (22), p.6302-6305</ispartof><rights>Copyright Optical Society of America Nov 15, 2020</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c356t-f6f45275b411af8eb4ab719c5b044229281823cefce08e6f9af777212dd711263</citedby><cites>FETCH-LOGICAL-c356t-f6f45275b411af8eb4ab719c5b044229281823cefce08e6f9af777212dd711263</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,3245,27901,27902</link.rule.ids></links><search><creatorcontrib>Sao, Mayu</creatorcontrib><creatorcontrib>Takeda, Satoru</creatorcontrib><creatorcontrib>Inami, Wataru</creatorcontrib><creatorcontrib>Kawata, Yoshimasa</creatorcontrib><title>Depth structure analysis by surface scanning in near-field microscopes</title><title>Optics letters</title><description>High-resolution imaging of the surfaces of samples can be performed
using near-field optical microscopes by scanning a small light spot;
however, structures located deep beneath cannot be observed because
the light spot spreads in three directions. In this study, we propose
an observation technique for near-field optical microscopes that can
obtain depth information within the resolution of the diffraction
limit of light by analyzing interference patterns formed with
divergent incident light and scattered light from a sample. We analyze
depth structures by evaluating correlation coefficients between
observed interference patterns and calculated reference patterns. Our
technique can observe both high-resolution surface images and the
diffraction-limited three-dimensional structure by scanning a
near-field light source on a single plane.</description><subject>Correlation analysis</subject><subject>Correlation coefficients</subject><subject>Diffraction patterns</subject><subject>High resolution</subject><subject>Image resolution</subject><subject>Incident light</subject><subject>Interference</subject><subject>Light</subject><subject>Light diffraction</subject><subject>Light sources</subject><subject>Light spots</subject><subject>Microscopes</subject><subject>Near field optical microscopes</subject><subject>Optical microscopes</subject><subject>Structural analysis</subject><issn>0146-9592</issn><issn>1539-4794</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNpd0LtOwzAYBWALgUS5DLyBJRYYUnx3PKJCASlSF5gtx_0NrlIn2MnQt6elTExn-XSkcxC6oWROuRIPq2YuCBOGnKAZldxUQhtximaEClUZadg5uihlQwhRmvMZWj7BMH7hMubJj1MG7JLrdiUW3O5wmXJwHnDxLqWYPnFMOIHLVYjQrfE2-twX3w9QrtBZcF2B67-8RB_L5_fFa9WsXt4Wj03luVRjFVQQkmnZCkpdqKEVrtXUeNkSIRgzrKY14x6CB1KDCsYFrTWjbL3WlDLFL9HdsXfI_fcEZbTbWDx0nUvQT8UyoYhWnGu5p7f_6Kaf8n7drzK1oDUle3V_VIcpJUOwQ45bl3eWEnt41K4ae3yU_wCTkmcn</recordid><startdate>20201115</startdate><enddate>20201115</enddate><creator>Sao, Mayu</creator><creator>Takeda, Satoru</creator><creator>Inami, Wataru</creator><creator>Kawata, Yoshimasa</creator><general>Optical Society of America</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope></search><sort><creationdate>20201115</creationdate><title>Depth structure analysis by surface scanning in near-field microscopes</title><author>Sao, Mayu ; Takeda, Satoru ; Inami, Wataru ; Kawata, Yoshimasa</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c356t-f6f45275b411af8eb4ab719c5b044229281823cefce08e6f9af777212dd711263</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Correlation analysis</topic><topic>Correlation coefficients</topic><topic>Diffraction patterns</topic><topic>High resolution</topic><topic>Image resolution</topic><topic>Incident light</topic><topic>Interference</topic><topic>Light</topic><topic>Light diffraction</topic><topic>Light sources</topic><topic>Light spots</topic><topic>Microscopes</topic><topic>Near field optical microscopes</topic><topic>Optical microscopes</topic><topic>Structural analysis</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Sao, Mayu</creatorcontrib><creatorcontrib>Takeda, Satoru</creatorcontrib><creatorcontrib>Inami, Wataru</creatorcontrib><creatorcontrib>Kawata, Yoshimasa</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>Optics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Sao, Mayu</au><au>Takeda, Satoru</au><au>Inami, Wataru</au><au>Kawata, Yoshimasa</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Depth structure analysis by surface scanning in near-field microscopes</atitle><jtitle>Optics letters</jtitle><date>2020-11-15</date><risdate>2020</risdate><volume>45</volume><issue>22</issue><spage>6302</spage><epage>6305</epage><pages>6302-6305</pages><issn>0146-9592</issn><eissn>1539-4794</eissn><abstract>High-resolution imaging of the surfaces of samples can be performed
using near-field optical microscopes by scanning a small light spot;
however, structures located deep beneath cannot be observed because
the light spot spreads in three directions. In this study, we propose
an observation technique for near-field optical microscopes that can
obtain depth information within the resolution of the diffraction
limit of light by analyzing interference patterns formed with
divergent incident light and scattered light from a sample. We analyze
depth structures by evaluating correlation coefficients between
observed interference patterns and calculated reference patterns. Our
technique can observe both high-resolution surface images and the
diffraction-limited three-dimensional structure by scanning a
near-field light source on a single plane.</abstract><cop>Washington</cop><pub>Optical Society of America</pub><doi>10.1364/OL.402490</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0146-9592 |
| ispartof | Optics letters, 2020-11, Vol.45 (22), p.6302-6305 |
| issn | 0146-9592 1539-4794 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_2460763375 |
| source | OSA Publishing |
| subjects | Correlation analysis Correlation coefficients Diffraction patterns High resolution Image resolution Incident light Interference Light Light diffraction Light sources Light spots Microscopes Near field optical microscopes Optical microscopes Structural analysis |
| title | Depth structure analysis by surface scanning in near-field microscopes |
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