Hydrogen evolution from a-C:H films

Diamond-like amorphous carbon films with high hardness, high electrical resistivity, good optical transparency into the infra-red, and good adherence to their substrates may be produced by many methods, most of which result in the incorporation of 20–40 at% hydrogen. These a-C:H films are similar to...

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Veröffentlicht in:	Vacuum 1985-01, Vol.35 (6), p.203-206
Hauptverfasser:	Nyaiesh, AR, Nowak, WB
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online-Zugang:	Volltext
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