A high speed signal averager for electron beam test systems
A new signal processing method is described for electron beam design validation of integrated circuits. The method uses a multi-point digital averager including a fast hardware integrator. The method is particularly suited to extraction of logic values in synchronism with an external clock, although...
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| Veröffentlicht in: | Microelectronic engineering 1987, Vol.7 (2), p.201-207 |
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| Sprache: | eng |
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| container_end_page | 207 |
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| container_issue | 2 |
| container_start_page | 201 |
| container_title | Microelectronic engineering |
| container_volume | 7 |
| creator | Machin, D.J. Ranasinghe, D.W. Proctor, G. |
| description | A new signal processing method is described for electron beam design validation of integrated circuits. The method uses a multi-point digital averager including a fast hardware integrator. The method is particularly suited to extraction of logic values in synchronism with an external clock, although it can easily be used for analogue waveform acquisition. A method for using the averager with a voltage measuring spectrometer is suggested which uses a digital convergence algorithm to calculate feedback voltages for the retarding grid. The system is compared with other signal processing systems for electron beam test systems. |
| doi_str_mv | 10.1016/S0167-9317(87)80012-6 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0167-9317 |
| ispartof | Microelectronic engineering, 1987, Vol.7 (2), p.201-207 |
| issn | 0167-9317 1873-5568 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_24474777 |
| source | Elsevier ScienceDirect Journals |
| title | A high speed signal averager for electron beam test systems |
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