10-pm-order mechanical displacement measurements using heterodyne interferometry

In this paper, we present 10-pm-order mechanical displacement measurements using heterodyne interferometry. The measuring system includes a single-path heterodyne interferometer and a phase meter based on a phase-locked loop (PLL). It is not easy to measure a mechanical displacement of 10 pm or less...

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Veröffentlicht in:	Applied optics (2004) 2020-09, Vol.59 (27), p.8478-8485
Hauptverfasser:	Dong Nguyen, Thanh, Higuchi, Masato, Tung Vu, Thanh, Wei, Dong, Aketagawa, Masato
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Displacement Evaluation Field programmable gate arrays Flexing Floors Interferometry Noise Noise measurement Noise reduction Phase locked loops Phase locked systems Piezoelectricity Signal processing Vacuum chambers
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