Silicon-Based 3D All-Solid-State Micro-Supercapacitor with Superior Performance

The large-scale fabrication of high-performance on-chip micro-supercapacitors (MSCs) is the footstone for the development of next-generation miniaturized electronic devices. In practical applications, however, MSCs may suffer from a low areal energy density as well as a complicated fabrication strat...

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Veröffentlicht in:	ACS applied materials & interfaces 2020-09, Vol.12 (39), p.43864-43875
Hauptverfasser:	Wang, Yurong, Sun, Leimeng, Xiao, Dongyang, Du, Huanhuan, Yang, Zhenting, Wang, Xinghui, Tu, Liangcheng, Zhao, Chun, Hu, Fangjing, Lu, Bingan
Format:	Artikel
Sprache:	eng
Schlagworte:	Energy, Environmental, and Catalysis Applications
Online-Zugang:	Volltext
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