Etching process of narrow wire and application to tunable-barrier electron pump

Single electron sources have been studied as a device to establish an electric current standard for 30 years and recently as an on-demand coherent source for fermion quantum optics. In order to construct the single electron source on a GaAs/AlGaAs two-dimensional electron gas (2DEG), it is often nec...

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Veröffentlicht in:	Review of scientific instruments 2020-08, Vol.91 (8), p.085110-085110
Hauptverfasser:	Norimoto, Shota, Iwakiri, Shuichi, Yokoi, Masahiko, Arakawa, Tomonori, Niimi, Yasuhiro, Kobayashi, Kensuke
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron beam lithography Electron gas Electron sources Electrons Etching Fermions Photolithography Photoresists Quantum optics Scientific apparatus & instruments Single electrons Wire
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