Nanoporous Silicon Thin Film-Based Hydrogen Sensor Using Metal-Assisted Chemical Etching with Annealed Palladium Nanoparticles

This article reports a nanoporous silicon (Si) thin-film-based high-performance and low-power hydrogen (H2) sensor fabricated by metal-assisted chemical etching (MaCE). The nanoporous Si thin film treated with Pd-based MaCE showed improvement over a flat Si thin film sensor in H2 response (ΔI/I 0 =...

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Veröffentlicht in:	ACS applied materials & interfaces 2020-09, Vol.12 (39), p.43614-43623
Hauptverfasser:	Kim, Hyeonggyun, Yun, Jeonghoon, Gao, Min, Kim, Hyeok, Cho, Minkyu, Park, Inkyu
Format:	Artikel
Sprache:	eng
Schlagworte:	Energy, Environmental, and Catalysis Applications
Online-Zugang:	Volltext
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