Dislocation analysis of germanium wafers under 1080  nm laser ablation

COMSOL Multiphysics was employed to establish a dislocation model based on the Alexander and Haasen (AH) model, the heat conduction equation, and Hooke’s law for calculating the dislocation distribution of germanium (Ge) under laser irradiation. The numerical simulation results were obtained. A cont...

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Veröffentlicht in:	Applied optics (2004) 2020-08, Vol.59 (23), p.6803-6808
Hauptverfasser:	Sha, YinChuan, Jia, ZhiChao, Li, Zewen, Pan, YunXiang, Nan, Pengyu, Ni, XiaoWu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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