Automatic inspection device for locating microscopic inclusions in optical components

Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are dete...

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Veröffentlicht in:Rev. Sci. Instrum.; (United States) 1986-11, Vol.57 (11), p.2743-2745
1. Verfasser: Marion, J. E.
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creator Marion, J. E.
description Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are detected by a photomultiplier tube, whose output is monitored by a computer, which then generates an inclusion map. Rapid and reliable inspection of the large optical components required for a variety of high‐energy systems is now possible.
doi_str_mv 10.1063/1.1139036
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Instrum.; (United States)</jtitle><date>1986-11-01</date><risdate>1986</risdate><volume>57</volume><issue>11</issue><spage>2743</spage><epage>2745</epage><pages>2743-2745</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are detected by a photomultiplier tube, whose output is monitored by a computer, which then generates an inclusion map. Rapid and reliable inspection of the large optical components required for a variety of high‐energy systems is now possible.</abstract><cop>Woodbury, NY</cop><pub>American Institute of Physics</pub><doi>10.1063/1.1139036</doi><tpages>3</tpages></addata></record>
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identifier ISSN: 0034-6748
ispartof Rev. Sci. Instrum.; (United States), 1986-11, Vol.57 (11), p.2743-2745
issn 0034-6748
1089-7623
language eng
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source AIP Digital Archive
subjects 420300 - Engineering- Lasers- (-1989)
440300 - Miscellaneous Instruments- (-1989)
Analysing. Testing. Standards
Applied sciences
AUTOMATION
CHEMICAL ANALYSIS
ENGINEERING
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
GLASS
INCLUSIONS
INSPECTION
LASER MATERIALS
LASERS
LAWRENCE LIVERMORE LABORATORY
MATERIALS
MATERIALS TESTING
Measurement of properties and materials state
Metals. Metallurgy
NATIONAL ORGANIZATIONS
NONDESTRUCTIVE TESTING
OPTICAL EQUIPMENT
Optical materials
Optics
OTHER INSTRUMENTATION
PHOTOMULTIPLIERS
PHOTOTUBES
Physics
Q-SWITCHING
QUANTITATIVE CHEMICAL ANALYSIS
SENSITIVITY
SOLID STATE LASERS
TESTING
US AEC
US DOE
US ERDA
US ORGANIZATIONS
title Automatic inspection device for locating microscopic inclusions in optical components
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