Automatic inspection device for locating microscopic inclusions in optical components
Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are dete...
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Veröffentlicht in: | Rev. Sci. Instrum.; (United States) 1986-11, Vol.57 (11), p.2743-2745 |
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container_title | Rev. Sci. Instrum.; (United States) |
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creator | Marion, J. E. |
description | Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are detected by a photomultiplier tube, whose output is monitored by a computer, which then generates an inclusion map. Rapid and reliable inspection of the large optical components required for a variety of high‐energy systems is now possible. |
doi_str_mv | 10.1063/1.1139036 |
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E.</creatorcontrib><creatorcontrib>Lawrence Livermore National Laboratory, University of California, Livermore, California 94550</creatorcontrib><title>Automatic inspection device for locating microscopic inclusions in optical components</title><title>Rev. Sci. Instrum.; (United States)</title><description>Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are detected by a photomultiplier tube, whose output is monitored by a computer, which then generates an inclusion map. Rapid and reliable inspection of the large optical components required for a variety of high‐energy systems is now possible.</description><subject>420300 - Engineering- Lasers- (-1989)</subject><subject>440300 - Miscellaneous Instruments- (-1989)</subject><subject>Analysing. Testing. Standards</subject><subject>Applied sciences</subject><subject>AUTOMATION</subject><subject>CHEMICAL ANALYSIS</subject><subject>ENGINEERING</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>GLASS</subject><subject>INCLUSIONS</subject><subject>INSPECTION</subject><subject>LASER MATERIALS</subject><subject>LASERS</subject><subject>LAWRENCE LIVERMORE LABORATORY</subject><subject>MATERIALS</subject><subject>MATERIALS TESTING</subject><subject>Measurement of properties and materials state</subject><subject>Metals. Metallurgy</subject><subject>NATIONAL ORGANIZATIONS</subject><subject>NONDESTRUCTIVE TESTING</subject><subject>OPTICAL EQUIPMENT</subject><subject>Optical materials</subject><subject>Optics</subject><subject>OTHER INSTRUMENTATION</subject><subject>PHOTOMULTIPLIERS</subject><subject>PHOTOTUBES</subject><subject>Physics</subject><subject>Q-SWITCHING</subject><subject>QUANTITATIVE CHEMICAL ANALYSIS</subject><subject>SENSITIVITY</subject><subject>SOLID STATE LASERS</subject><subject>TESTING</subject><subject>US AEC</subject><subject>US DOE</subject><subject>US ERDA</subject><subject>US ORGANIZATIONS</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1986</creationdate><recordtype>article</recordtype><recordid>eNqN0UtLxDAQAOAgCq6rB_9BEREUumaaR9ujLL5gwYt7Dtk00Uib1Ka74L83tct6ENRcEsg3k8wMQqeAZ4A5uYYZACkx4XtoArgo05xnZB9NMCY05TktDtFRCG84LgYwQcubde8b2VuVWBdarXrrXVLpjVU6Mb5Laq_irXtJGqs6H5Rvv6iq1yHKEI-Jb2O4rBPlm9Y77fpwjA6MrIM-2e5TtLy7fZ4_pIun-8f5zSJVFPM-lbrKmTS0LLQ0WPEKmDFYEw55LKEqdAaEsoJXkmQlq3RWrjK-WpVU5QxnjJEpOhvz-tBbEZTttXpV3rlYh2DAKMS6p-hiRG3n39c69KKxQem6lk77dRAZJVmeM_4_yAuI8HKEQ0dCp41oO9vI7kMAFsMYBIjtGKI93yaVITbJdNIpG3YBeVky4OxPxjnhxcCuRjbUKodZ7cjGd9_PirYyv-Gf__wEwUmvWQ</recordid><startdate>19861101</startdate><enddate>19861101</enddate><creator>Marion, J. E.</creator><general>American Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>H8D</scope><scope>OTOTI</scope></search><sort><creationdate>19861101</creationdate><title>Automatic inspection device for locating microscopic inclusions in optical components</title><author>Marion, J. E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c406t-aed75af498eaf0c6d15ff0e3617903d8e2134586da3295de29b26bb94c7502553</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1986</creationdate><topic>420300 - Engineering- Lasers- (-1989)</topic><topic>440300 - Miscellaneous Instruments- (-1989)</topic><topic>Analysing. Testing. Standards</topic><topic>Applied sciences</topic><topic>AUTOMATION</topic><topic>CHEMICAL ANALYSIS</topic><topic>ENGINEERING</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>GLASS</topic><topic>INCLUSIONS</topic><topic>INSPECTION</topic><topic>LASER MATERIALS</topic><topic>LASERS</topic><topic>LAWRENCE LIVERMORE LABORATORY</topic><topic>MATERIALS</topic><topic>MATERIALS TESTING</topic><topic>Measurement of properties and materials state</topic><topic>Metals. Metallurgy</topic><topic>NATIONAL ORGANIZATIONS</topic><topic>NONDESTRUCTIVE TESTING</topic><topic>OPTICAL EQUIPMENT</topic><topic>Optical materials</topic><topic>Optics</topic><topic>OTHER INSTRUMENTATION</topic><topic>PHOTOMULTIPLIERS</topic><topic>PHOTOTUBES</topic><topic>Physics</topic><topic>Q-SWITCHING</topic><topic>QUANTITATIVE CHEMICAL ANALYSIS</topic><topic>SENSITIVITY</topic><topic>SOLID STATE LASERS</topic><topic>TESTING</topic><topic>US AEC</topic><topic>US DOE</topic><topic>US ERDA</topic><topic>US ORGANIZATIONS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Marion, J. E.</creatorcontrib><creatorcontrib>Lawrence Livermore National Laboratory, University of California, Livermore, California 94550</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Aerospace Database</collection><collection>OSTI.GOV</collection><jtitle>Rev. Sci. Instrum.; (United States)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Marion, J. E.</au><aucorp>Lawrence Livermore National Laboratory, University of California, Livermore, California 94550</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Automatic inspection device for locating microscopic inclusions in optical components</atitle><jtitle>Rev. Sci. Instrum.; (United States)</jtitle><date>1986-11-01</date><risdate>1986</risdate><volume>57</volume><issue>11</issue><spage>2743</spage><epage>2745</epage><pages>2743-2745</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>Automatic inspection of large optical components for the presence of microscopic metallic inclusions in the parts‐per‐quadrillion concentration range is performed by a simple device in which a Q‐switched YAG laser is focused on a continuously scanned sample. Plasma emissions from inclusions are detected by a photomultiplier tube, whose output is monitored by a computer, which then generates an inclusion map. Rapid and reliable inspection of the large optical components required for a variety of high‐energy systems is now possible.</abstract><cop>Woodbury, NY</cop><pub>American Institute of Physics</pub><doi>10.1063/1.1139036</doi><tpages>3</tpages></addata></record> |
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subjects | 420300 - Engineering- Lasers- (-1989) 440300 - Miscellaneous Instruments- (-1989) Analysing. Testing. Standards Applied sciences AUTOMATION CHEMICAL ANALYSIS ENGINEERING Exact sciences and technology Fundamental areas of phenomenology (including applications) GLASS INCLUSIONS INSPECTION LASER MATERIALS LASERS LAWRENCE LIVERMORE LABORATORY MATERIALS MATERIALS TESTING Measurement of properties and materials state Metals. Metallurgy NATIONAL ORGANIZATIONS NONDESTRUCTIVE TESTING OPTICAL EQUIPMENT Optical materials Optics OTHER INSTRUMENTATION PHOTOMULTIPLIERS PHOTOTUBES Physics Q-SWITCHING QUANTITATIVE CHEMICAL ANALYSIS SENSITIVITY SOLID STATE LASERS TESTING US AEC US DOE US ERDA US ORGANIZATIONS |
title | Automatic inspection device for locating microscopic inclusions in optical components |
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