Low temperature oxidation of metals and semiconductors

The growth of oxide films on metals and semiconductors (Ge, Si, Pb, Cr, Fe, Ni, Ta, Cu, Na and beryllium) at low temp. has been interpreted using the Cabrera--Mott theory which assumes a uniform oxide structure. Kinetic data taken from the literature were introduced into the Ghez integration of the...

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Veröffentlicht in:Journal of the Electrochemical Society 1984-07, Vol.131 (7), p.1645-1652
1. Verfasser: FEHLNER, F. P
Format: Artikel
Sprache:eng
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