Auger electron spectroscopy study on the interfacial chemical reactions and drive-out diffusion of thin Au/Cr bilayers on GaAs

The contact reaction and drive-out diffusion between a GaAs substrate and a bilayer of thin films of gold and chromium were studied. The interdiffusion and drive-out diffusion were analyzed by Auger electron spectroscopy. Drive-out diffusion of gallium, arsenic and chromium atoms was observed. The arsenic and gallium concentrations close to the surface depend on the thickness of the chromium layer. The thickness of the arsenic-rich surface layer shows a linear dependence on the chromium layer thickness.