Patterned aluminum growth via excimer laser activated metalorganic chemical vapor deposition

Excimer laser photolysis of organoaluminum adlayers has been used to catalytically activate the deposition of Al via thermal decomposition of triisobutylaluminum. The process exhibits good spatial selectivity and patterns with 4 μm resolution have been accurately reproduced. Patterned Al metallizati...

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Veröffentlicht in:	Applied physics letters 1986-04, Vol.48 (16), p.1051-1053
Hauptverfasser:	HIGASHI, G. S, FLEMING, C. G
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysing. Testing. Standards Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Measurement of properties and materials state Metals, semimetals and alloys Metals. Metallurgy Nondestructive testing Other techniques and industries Physics Specific materials Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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