Negative Ion Kinetics in RF Glow Discharges

Using temporally and spatially resolved laser spectroscopy, we have determined the identities, approximate concentrations, effects on the local field, and kinetics of formation and loss of negative ions in RF discharges. Cl- and BCl3- are the dominant negative ions found in low-frequency discharges...

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Veröffentlicht in:	IEEE Trans. Plasma Sci.; (United States) 1986-04, Vol.14 (2), p.92-102
Hauptverfasser:	Gottscho, Richard A., Gaebe, Carl E.
Format:	Artikel
Sprache:	eng
Schlagworte:	420800 - Engineering- Electronic Circuits & Devices- (-1989) AFFINITY ANODES BORON CHLORIDES BORON COMPOUNDS CATHODES CHARGED PARTICLES CHLORIDES CHLORINE COMPOUNDS CHLORINE IONS COLLISIONS ELECTRIC DISCHARGES ELECTRODES ELECTRONS ELEMENTARY PARTICLES ENERGY RANGE ENGINEERING EV RANGE EV RANGE 01-10 Exact sciences and technology FERMIONS GLOW DISCHARGES HALIDES HALOGEN COMPOUNDS ION COLLISIONS ION DENSITY ION MOBILITY IONS Kinetic theory LASER SPECTROSCOPY LEPTONS MOBILITY PARTICLE MOBILITY Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges PLASMA Plasma accelerators Plasma density Plasma sheaths Radio frequency RF SYSTEMS Spatial resolution SPECTROSCOPY
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