Electron beam testing of ultra large scale integrated circuits

Electron beam testing is finding increasing acceptance within the semiconductor industry as a design analysis tool. In this paper the needs of semiconductor engineers are reviewed. These are then compared with the performance of currently available electron beam test systems as well as with the pred...

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Bibliographische Detailangaben

Veröffentlicht in:	Microelectronic engineering 1986, Vol.4 (2), p.121-138
1. Verfasser:	Garth, Simon C.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electron beam testing Electronics Exact sciences and technology Integrated circuits local field effect Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ULSI
Online-Zugang:	Volltext
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