Direct integration of micro-LEDs and a SPAD detector on a silicon CMOS chip for data communications and time-of-flight ranging

We present integration of singulated micron-sized light emitting diodes (micro-LEDs) directly onto a silicon CMOS drive chip using a transfer printing method. An 8x8 micro-LED device array with individual control over each pixel is demonstrated with modulation bandwidths up to 50 MHz, limited by the...

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Veröffentlicht in:	Optics express 2020-03, Vol.28 (5), p.6909-6917
Hauptverfasser:	Carreira, J F C, Griffiths, A D, Xie, E, Guilhabert, B J E, Herrnsdorf, J, Henderson, R K, Gu, E, Strain, M J, Dawson, M D
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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