Quantum Chemistry Study on Gas Reaction Mechanism in AlN MOVPE Growth

By using the density functional theory of quantum chemistry, the gas reaction mechanism in the AlN MOVPE process has been investigated, especially after the amide DMAlNH2 formation. Two reaction paths are distinguished after the amide DMAlNH2 formation and oligomerization: the intramolecular path an...

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Veröffentlicht in:	The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory Molecules, spectroscopy, kinetics, environment, & general theory, 2020-04, Vol.124 (15), p.2961-2971
Hauptverfasser:	Zhang, Hong, Zuo, Ran, Zhong, Tingting, Zhang, Lian
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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