Convex silica microlens arrays via femtosecond laser writing

We report fabrication of silica convex microlens arrays with controlled shape, size, and curvature by femtosecond laser direct writing. A backside etching in dye solution was utilized for laser machining high-fidelity control of material removal and real-time surface cleaning from ablation debris. T...

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Veröffentlicht in:	Optics letters 2020-02, Vol.45 (3), p.636-639
Hauptverfasser:	Hua, Jian-Guan, Ren, Hang, Jia, Ao, Tian, Zhen-Nan, Wang, Lei, Juodkazis, Saulius, Chen, Qi-Dai, Sun, Hong-Bo
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablative materials Cleaning Direct laser writing Etching Femtosecond pulsed lasers Hard materials Laser arrays Laser machining Lasers Optical components Silicon dioxide Surface roughness
Online-Zugang:	Volltext
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