Direct-coupled GaAs ring oscillators with self-aligned gates

The performance of direct-coupled GaAs MESFET ring oscillators having a 1µm self-aligned recessed-gate structure defined by optical contact lithography on CVD epitaxial material is reported. Propagation delays as low as 20.9 and 16.1 ps/stage have been achieved at 300 and 77 K, respectively, represe...

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Veröffentlicht in:	IEEE electron device letters 1982-11, Vol.3 (11), p.325-326
Hauptverfasser:	Kiehl, R.A., Flahive, P.G., Wemple, S.H., Cox, H.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	FETs Gallium arsenide Inverters Lithography MESFETs Plasma temperature Propagation delay Ring oscillators Transconductance Voltage
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