Quartz tuning fork based three-dimensional topography imaging for sidewall with blind features

Atomic force microscopy has a tremendous number of applications in a wide variety of fields, particularly in the semiconductor area for the 3D-stacked device. Imaging three-dimensional (3D) structures with blind features has progressively become a critical technique. Recently, a 3D-atomic force micr...

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Veröffentlicht in:	Ultramicroscopy 2020-03, Vol.210, p.112916-112916, Article 112916
Hauptverfasser:	Akhtar, Imtisal, Rehman, Malik Abdul, Choi, Woosuk, Bae, Joonho, Seo, Yongho
Format:	Artikel
Sprache:	eng
Schlagworte:	3D topography Nanostructure imaging Scanning algorithm Scanning probe microscopy Sidewall imaging Through silicon via
Online-Zugang:	Volltext
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