Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection
We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary me...
Gespeichert in:
| Veröffentlicht in: | ACS applied materials & interfaces 2019-11, Vol.11 (45), p.42349-42357 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 42357 |
|---|---|
| container_issue | 45 |
| container_start_page | 42349 |
| container_title | ACS applied materials & interfaces |
| container_volume | 11 |
| creator | Yun, Jeonghoon Ahn, Jae-Hyuk Moon, Dong-Il Choi, Yang-Kyu Park, Inkyu |
| description | We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal–oxide–semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW ( |
| doi_str_mv | 10.1021/acsami.9b15111 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_2306493597</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2306493597</sourcerecordid><originalsourceid>FETCH-LOGICAL-a373t-d7fa1500284132278813df0c2bd3f2fe46552b86a6a80643c0b1ddaca4e7d893</originalsourceid><addsrcrecordid>eNp1kMtLAzEQxoMoWKtXz3sUYWte-zpqfVQpKrT3MJtMZMs2qckupf-9K1u8eRhm5uP7DcxHyDWjM0Y5uwMdYdvMqppljLETMmGVlGnJM376N0t5Ti5i3FCaC06zCTFvvm8xXSB0aBJwJln1cYfODNuqaRvtXfIOzu-bgMkDxF8ZXfQhsUMt_T799HsMI9lB3WKyOJjgv9Alj9ih7hrvLsmZhTbi1bFPyfr5aT1fpMuPl9f5_TIFUYguNYUFllHKS8kE50VZMmEs1bw2wnKLMs8yXpc55FDSXApNa2YMaJBYmLISU3Iznt0F_91j7NS2iRrbFhz6PiouBqoSWVUM1tlo1cHHGNCqXWi2EA6KUfWbphrTVMc0B-B2BAZdbXwf3PDIf-YfZ493Iw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2306493597</pqid></control><display><type>article</type><title>Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection</title><source>ACS Publications</source><creator>Yun, Jeonghoon ; Ahn, Jae-Hyuk ; Moon, Dong-Il ; Choi, Yang-Kyu ; Park, Inkyu</creator><creatorcontrib>Yun, Jeonghoon ; Ahn, Jae-Hyuk ; Moon, Dong-Il ; Choi, Yang-Kyu ; Park, Inkyu</creatorcontrib><description>We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal–oxide–semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H2 gas with a faster response and without the reduction of sensitivity unlike other Pd-based H2 gas sensors. We proposed a H2 sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H2 response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 μW) than the substrate-bound Pd-SiNW (613 μW). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H2 sensing performance in humid or carbon monoxide environments.</description><identifier>ISSN: 1944-8244</identifier><identifier>EISSN: 1944-8252</identifier><identifier>DOI: 10.1021/acsami.9b15111</identifier><language>eng</language><publisher>American Chemical Society</publisher><ispartof>ACS applied materials & interfaces, 2019-11, Vol.11 (45), p.42349-42357</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-a373t-d7fa1500284132278813df0c2bd3f2fe46552b86a6a80643c0b1ddaca4e7d893</citedby><cites>FETCH-LOGICAL-a373t-d7fa1500284132278813df0c2bd3f2fe46552b86a6a80643c0b1ddaca4e7d893</cites><orcidid>0000-0001-5761-7739 ; 0000-0001-7490-000X ; 0000-0001-6678-5451</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://pubs.acs.org/doi/pdf/10.1021/acsami.9b15111$$EPDF$$P50$$Gacs$$H</linktopdf><linktohtml>$$Uhttps://pubs.acs.org/doi/10.1021/acsami.9b15111$$EHTML$$P50$$Gacs$$H</linktohtml><link.rule.ids>314,780,784,2765,27076,27924,27925,56738,56788</link.rule.ids></links><search><creatorcontrib>Yun, Jeonghoon</creatorcontrib><creatorcontrib>Ahn, Jae-Hyuk</creatorcontrib><creatorcontrib>Moon, Dong-Il</creatorcontrib><creatorcontrib>Choi, Yang-Kyu</creatorcontrib><creatorcontrib>Park, Inkyu</creatorcontrib><title>Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection</title><title>ACS applied materials & interfaces</title><addtitle>ACS Appl. Mater. Interfaces</addtitle><description>We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal–oxide–semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H2 gas with a faster response and without the reduction of sensitivity unlike other Pd-based H2 gas sensors. We proposed a H2 sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H2 response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 μW) than the substrate-bound Pd-SiNW (613 μW). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H2 sensing performance in humid or carbon monoxide environments.</description><issn>1944-8244</issn><issn>1944-8252</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNp1kMtLAzEQxoMoWKtXz3sUYWte-zpqfVQpKrT3MJtMZMs2qckupf-9K1u8eRhm5uP7DcxHyDWjM0Y5uwMdYdvMqppljLETMmGVlGnJM376N0t5Ti5i3FCaC06zCTFvvm8xXSB0aBJwJln1cYfODNuqaRvtXfIOzu-bgMkDxF8ZXfQhsUMt_T799HsMI9lB3WKyOJjgv9Alj9ih7hrvLsmZhTbi1bFPyfr5aT1fpMuPl9f5_TIFUYguNYUFllHKS8kE50VZMmEs1bw2wnKLMs8yXpc55FDSXApNa2YMaJBYmLISU3Iznt0F_91j7NS2iRrbFhz6PiouBqoSWVUM1tlo1cHHGNCqXWi2EA6KUfWbphrTVMc0B-B2BAZdbXwf3PDIf-YfZ493Iw</recordid><startdate>20191113</startdate><enddate>20191113</enddate><creator>Yun, Jeonghoon</creator><creator>Ahn, Jae-Hyuk</creator><creator>Moon, Dong-Il</creator><creator>Choi, Yang-Kyu</creator><creator>Park, Inkyu</creator><general>American Chemical Society</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0001-5761-7739</orcidid><orcidid>https://orcid.org/0000-0001-7490-000X</orcidid><orcidid>https://orcid.org/0000-0001-6678-5451</orcidid></search><sort><creationdate>20191113</creationdate><title>Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection</title><author>Yun, Jeonghoon ; Ahn, Jae-Hyuk ; Moon, Dong-Il ; Choi, Yang-Kyu ; Park, Inkyu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a373t-d7fa1500284132278813df0c2bd3f2fe46552b86a6a80643c0b1ddaca4e7d893</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yun, Jeonghoon</creatorcontrib><creatorcontrib>Ahn, Jae-Hyuk</creatorcontrib><creatorcontrib>Moon, Dong-Il</creatorcontrib><creatorcontrib>Choi, Yang-Kyu</creatorcontrib><creatorcontrib>Park, Inkyu</creatorcontrib><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>ACS applied materials & interfaces</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yun, Jeonghoon</au><au>Ahn, Jae-Hyuk</au><au>Moon, Dong-Il</au><au>Choi, Yang-Kyu</au><au>Park, Inkyu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection</atitle><jtitle>ACS applied materials & interfaces</jtitle><addtitle>ACS Appl. Mater. Interfaces</addtitle><date>2019-11-13</date><risdate>2019</risdate><volume>11</volume><issue>45</issue><spage>42349</spage><epage>42357</epage><pages>42349-42357</pages><issn>1944-8244</issn><eissn>1944-8252</eissn><abstract>We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal–oxide–semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H2 gas with a faster response and without the reduction of sensitivity unlike other Pd-based H2 gas sensors. We proposed a H2 sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H2 response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 μW) than the substrate-bound Pd-SiNW (613 μW). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H2 sensing performance in humid or carbon monoxide environments.</abstract><pub>American Chemical Society</pub><doi>10.1021/acsami.9b15111</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0001-5761-7739</orcidid><orcidid>https://orcid.org/0000-0001-7490-000X</orcidid><orcidid>https://orcid.org/0000-0001-6678-5451</orcidid></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1944-8244 |
| ispartof | ACS applied materials & interfaces, 2019-11, Vol.11 (45), p.42349-42357 |
| issn | 1944-8244 1944-8252 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_2306493597 |
| source | ACS Publications |
| title | Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-21T09%3A46%3A12IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Joule-Heated%20and%20Suspended%20Silicon%20Nanowire%20Based%20Sensor%20for%20Low-Power%20and%20Stable%20Hydrogen%20Detection&rft.jtitle=ACS%20applied%20materials%20&%20interfaces&rft.au=Yun,%20Jeonghoon&rft.date=2019-11-13&rft.volume=11&rft.issue=45&rft.spage=42349&rft.epage=42357&rft.pages=42349-42357&rft.issn=1944-8244&rft.eissn=1944-8252&rft_id=info:doi/10.1021/acsami.9b15111&rft_dat=%3Cproquest_cross%3E2306493597%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2306493597&rft_id=info:pmid/&rfr_iscdi=true |