Mid-infrared optical characterization of thin SiNx membranes

The investigation of the optical constants (e.g., the refractive index n and the extinction coefficient K) has been performed in the mid-infrared spectrum for various silicon nitride (SiNx) configurations. By exploiting the transfer matrix method formulation, photometric measurements of transmission...

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Veröffentlicht in:	Applied optics (2004) 2019-07, Vol.58 (19), p.52331-5239
Hauptverfasser:	Stocchi, M, Mencarelli, D, Pierantoni, L, Kot, D, Lisker, M, Göritz, A, Kaynak, C Baristiran, Wietstruck, M, Kaynak, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Error correction Infrared spectra Mathematical analysis Optical properties Parameters Photometry Refractivity Silicon nitride Transfer matrices
Online-Zugang:	Volltext
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