Thin Films and Solid-Phase Reactions
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Veröffentlicht in: | Science (American Association for the Advancement of Science) 1975-10, Vol.190 (4211), p.228-234 |
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container_end_page | 234 |
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container_issue | 4211 |
container_start_page | 228 |
container_title | Science (American Association for the Advancement of Science) |
container_volume | 190 |
creator | Mayer, James W. Poate, John M. Tu, King-Ning |
description | |
doi_str_mv | 10.1126/science.190.4211.228 |
format | Article |
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fulltext | fulltext |
identifier | ISSN: 0036-8075 |
ispartof | Science (American Association for the Advancement of Science), 1975-10, Vol.190 (4211), p.228-234 |
issn | 0036-8075 1095-9203 |
language | eng |
recordid | cdi_proquest_miscellaneous_22496142 |
source | Science Magazine; JSTOR Archive Collection A-Z Listing |
subjects | Aluminum Atoms Backscattering Heat treatment Low temperature Room temperature Silicides Thin films X ray diffraction X ray film |
title | Thin Films and Solid-Phase Reactions |
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