Purity and morphology of aluminium films

A continuous wire feed source of aluminium of 99.999% purity in conjunction with a composite ceramic boat has been used to deposit aluminium films of high purity in vacuum. The impurity content was analysed by proton-induced X-ray analysis with a Van de Graaff accelerator, supplemented by X-ray fluo...

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Veröffentlicht in:	Thin solid films 1975-01, Vol.30 (2), p.267-279
Hauptverfasser:	Dhere, Neelkanth G., Arsenio, Therezinha P., Patnaik, Bijoy K.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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