High-Q tellurium-oxide-coated silicon nitride microring resonators

We report on tellurium-oxide (TeO )-coated silicon nitride microring resonators with internal quality factors up to 7.3×10 , corresponding to 0.5 dB/cm waveguide loss, at wavelengths around 1550 nm. The microring resonators are fabricated using a silicon nitride foundry process followed by TeO coati...

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Veröffentlicht in:	Optics letters 2019-01, Vol.44 (1), p.118-121
Hauptverfasser:	Frankis, Henry C, Kiani, Khadijeh Miarabbas, Su, Daniel, Mateman, Richard, Leinse, Arne, Bradley, Jonathan D B
Format:	Artikel
Sprache:	eng
Schlagworte:	Bend radius Coating Photonics Post-processing Rare earth elements Resonators Silicon nitride Tellurium Tellurium dioxide
Online-Zugang:	Volltext
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