Fabrication and Characterization of a Sensing Device Based on Porous Silicon
In this work we have fabricated a simple gas‐sensing device based on porous silicon. Starting from the well‐known porous silicon photoluminescence quenching due to oxygen, we have optimized the material and the device design, obtaining a reversible and stable O2 gas sensor. A simple and cheap detect...
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| Veröffentlicht in: | Physica status solidi. A, Applied research Applied research, 2000-11, Vol.182 (1), p.473-477 |
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| container_title | Physica status solidi. A, Applied research |
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| creator | Quercia, L. Cerullo, F. La Ferrara, V. Di Francia, G. Baratto, C. Fagilia, G. |
| description | In this work we have fabricated a simple gas‐sensing device based on porous silicon. Starting from the well‐known porous silicon photoluminescence quenching due to oxygen, we have optimized the material and the device design, obtaining a reversible and stable O2 gas sensor. A simple and cheap detector of air leaks in inert environment is of great interest for the alimentary industry. Full characterization of the device has been carried out in a gas sensor calibration apparatus, showing even a promising sensitivity at room temperature to a toxic gas like NO2. |
| doi_str_mv | 10.1002/1521-396X(200011)182:1<473::AID-PSSA473>3.0.CO;2-K |
| format | Article |
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| ispartof | Physica status solidi. A, Applied research, 2000-11, Vol.182 (1), p.473-477 |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Current density Electrochemistry Etching Fabrication Leakage (fluid) Nitrogen oxides Oxygen Oxygen sensors Photoluminescence Silicon wafers |
| title | Fabrication and Characterization of a Sensing Device Based on Porous Silicon |
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