Micromachining of non-fouling coatings for bio-MEMS applications
Standard photolithography is used to pattern a poly (ethylene glycol) (PEG)-like polymer onto silicon substrates. The coating has excellent non-fouling properties and good adhesion to various substrate materials, such as silicon, oxide, nitride, gold, and platinum. This method allows precise control...
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Veröffentlicht in: | Sensors and actuators. B, Chemical Chemical, 2001-12, Vol.81 (1), p.49-54 |
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container_title | Sensors and actuators. B, Chemical |
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creator | Hanein, Yael Pan, Y.Vickie Ratner, Buddy D. Denton, Denice D. Böhringer, Karl F. |
description | Standard photolithography is used to pattern a poly (ethylene glycol) (PEG)-like polymer onto silicon substrates. The coating has excellent non-fouling properties and good adhesion to various substrate materials, such as silicon, oxide, nitride, gold, and platinum. This method allows precise control of the shape, size and alignment of the polymer, thus providing a reliable tool to pattern protein sheets as well as cell cultures. This method also enables the incorporation of patterned cell cultures with various predefined elements such as electrodes, channels, and sensors. To demonstrate the properties of our technique, we apply it to build cell cultures and to protect metallic electrodes from protein and cell adhesion. We show that the thin coatings provide excellent protection without compromising the conductivity of the electrodes. |
doi_str_mv | 10.1016/S0925-4005(01)00925-X |
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We show that the thin coatings provide excellent protection without compromising the conductivity of the electrodes.</description><subject>Adhesion</subject><subject>Bio-fouling</subject><subject>Bio-MEMS</subject><subject>Cell culture</subject><subject>Cell cultures</subject><subject>Electrodes</subject><subject>Microelectromechanical devices</subject><subject>Micromachining</subject><subject>Photolithography</subject><subject>Polyethylene glycols</subject><subject>Proteins</subject><subject>Substrates</subject><issn>0925-4005</issn><issn>1873-3077</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2001</creationdate><recordtype>article</recordtype><recordid>eNqFkEtLAzEUhYMoWKs_QZiV6CJ6M5NMJiuVUh_Q4qIK3YVMHhqZTsZkWvDfO23FravL4Z5z4HwInRO4JkDKmwWInGEKwC6BXMFOLQ_QiFS8wAVwfohGf5ZjdJLSJwDQooQRupt7HcNK6Q_f-vY9Cy5rQ4tdWDdbqYPqh5syF2JW-4Dn0_kiU13XeD18QptO0ZFTTbJnv3eM3h6mr5MnPHt5fJ7cz7CmRdFjWtXMCkGVyIniNTOlM4465mrNTVGWojZVXjrBeCUsL6uags6hMoqQnGumijG62Pd2MXytberlyidtm0a1NqyTzAllgkA1GNneOOxKKVonu-hXKn5LAnLLS-54yS0MCUTueMnlkLvd5-ywYuNtlEl722prfLS6lyb4fxp-AMj_chc</recordid><startdate>20011215</startdate><enddate>20011215</enddate><creator>Hanein, Yael</creator><creator>Pan, Y.Vickie</creator><creator>Ratner, Buddy D.</creator><creator>Denton, Denice D.</creator><creator>Böhringer, Karl F.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20011215</creationdate><title>Micromachining of non-fouling coatings for bio-MEMS applications</title><author>Hanein, Yael ; Pan, Y.Vickie ; Ratner, Buddy D. ; Denton, Denice D. ; Böhringer, Karl F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c433t-48b5e994a921a7b5d6fdf4f5fbc7d3669bd826f95789e768b40c208da1127c5a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2001</creationdate><topic>Adhesion</topic><topic>Bio-fouling</topic><topic>Bio-MEMS</topic><topic>Cell culture</topic><topic>Cell cultures</topic><topic>Electrodes</topic><topic>Microelectromechanical devices</topic><topic>Micromachining</topic><topic>Photolithography</topic><topic>Polyethylene glycols</topic><topic>Proteins</topic><topic>Substrates</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hanein, Yael</creatorcontrib><creatorcontrib>Pan, Y.Vickie</creatorcontrib><creatorcontrib>Ratner, Buddy D.</creatorcontrib><creatorcontrib>Denton, Denice D.</creatorcontrib><creatorcontrib>Böhringer, Karl F.</creatorcontrib><collection>CrossRef</collection><jtitle>Sensors and actuators. 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subjects | Adhesion Bio-fouling Bio-MEMS Cell culture Cell cultures Electrodes Microelectromechanical devices Micromachining Photolithography Polyethylene glycols Proteins Substrates |
title | Micromachining of non-fouling coatings for bio-MEMS applications |
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