Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis

Acoustophoresis, the movement of particles with sound, has evolved as a promising handling tool for micrometer-sized particles. Recent developments in thin film deposition technologies have enabled the reproducible fabrication of thin film piezoelectric materials for miniaturized ultrasound transduc...

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Veröffentlicht in:	Lab on a chip 2018-12, Vol.18 (23), p.3655-3667
Hauptverfasser:	Reichert, Peter, Deshmukh, Dhananjay, Lebovitz, Lukas, Dual, Jürg
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic streaming Acoustic waves Acoustics Acoustophoresis Actuation Continuous flow Lead zirconate titanates Low voltage Piezoelectricity Pulsed laser deposition Pulsed lasers Thin films Transducers Zirconium
Online-Zugang:	Volltext
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