Fully embedded photonic crystal cavity with Q=0.6 million fabricated within a full-process CMOS multiproject wafer
A two dimensional photonic crystal (PhC) resonator, based on a recent design concept, entirely embedded in Silica, is fabricated in a CMOS full-process multiproject wafer, including additional steps such as implantation, metalization, Germanium deposition and planarization. A large loaded Q-factor (...
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| Veröffentlicht in: | Optics express 2018-08, Vol.26 (16), p.20868-20877 |
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| container_issue | 16 |
| container_start_page | 20868 |
| container_title | Optics express |
| container_volume | 26 |
| creator | Dodane, Delphin Bourderionnet, Jérôme Combrié, Sylvain de Rossi, Alfredo |
| description | A two dimensional photonic crystal (PhC) resonator, based on a recent design concept, entirely embedded in Silica, is fabricated in a CMOS full-process multiproject wafer, including additional steps such as implantation, metalization, Germanium deposition and planarization. A large loaded Q-factor (5.9 × 10
) is achieved without removal of the silica cladding. A statistical analysis over 56 devices leads to an average value for the loaded Q of 4 × 10
, in close agreement with calculations. An upper boundary for the fabrication disorder is estimated to 1.2 nm. |
| doi_str_mv | 10.1364/OE.26.020868 |
| format | Article |
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| source | Free E-Journal (出版社公開部分のみ）; DOAJ Directory of Open Access Journals; Alma/SFX Local Collection |
| title | Fully embedded photonic crystal cavity with Q=0.6 million fabricated within a full-process CMOS multiproject wafer |
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