Fabrication of Si-based planar type patch clamp biosensor using silicon on insulator substrate

The aim of this paper is to fabricate the planar type patch clamp ion-channel biosensor, which is suitable for the high throughput screening, using silicon-on-insulator (SOI) substrate. The micropore with 1.2 μm diameter is formed through the top Si layer and the SiO 2 box layer of the SOI substrate...

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Veröffentlicht in:	Thin solid films 2008-03, Vol.516 (9), p.2813-2815
Hauptverfasser:	Zhang, Z.L., Asano, T., Uno, H., Tero, R., Suzui, M., Nakao, S., Kaito, T., Shibasaki, K., Tominaga, M., Utsumi, Y., Gao, Y.L., Urisu, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Biosensor Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Molecular electronics, nanoelectronics Physics Planar patch clamp Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing SOI substrate TRPV1 channel
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